New
APSY-E200 MACHINE
Description
Evaporation machine composed of an evaporation assembly by electron gun and two Joule effects. Each with their deposit control by quartz balance.
Several types of nacelles or filaments, or multi-hollows can be offered to you.
We find on the chamber flanges of different standards and sizes, allowing the addition of all types of equipment and the possibility of a future upgrade of the system.
The system is entirely controlled by a PLC/HMI unit, SIEMENS.
specifications
All our new systems are guaranteed for two years, on-site interventions within 48 hours, remote maintenance. Preventive maintenance at the end of the warranty period.
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CT10 cryogenic pumping and 9600 CTI compressor
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Leybold VARODY VD100 dry screw primary pump
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Absolute pressure gauges MKS 974B and pirani 925
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TEMESCAL set, STIH 2CK 4 x 25cc gun with CV-12KW power supply
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Shutter
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Deposit control by two quartz balances and Inficon XTC3 controller.
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Dome Ø 560mm, disengageable rotation system from 1 to 20 rpm
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Argon effluvage, DC 300-4000V, 08A
supervising
The functions of the program provide a permanent support for monitoring the progress of the actions carried out by the system, in the form of graphic and dynamic representation, events or even curves.
Different user levels are available. Each of them permit a secure access and use according to the user.
Each action, alarm or feedback is associated with a textual description of different levels, blocking or not.
These events are stored in the log.
The general interface gives you as much visible data as possible. Of type, pressures, powers, movements, statuses of the various subsets of the system, etc.
Several user functions are available: production, manual, cycles and maintenance.
dimensions
System size :
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Height : 2200mm.
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Width : 1100mm.
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Profundity : 1800mm.
Chamber dimensions :
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Height : 609mm.
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Width : 609mm.
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Profundity : 609mm.
