The system makes it possible to make deposits, inside the substrate on a diameter of 10mm minimum.
The pumping is carried out by a dry unit, comprising a turbomolecular pump isolated from the chamber by a valve and a primary pump. The system has a Joule effect. Several types of nacelles or filaments can be offered to you.
The system is entirely controlled by a PLC/HMI unit, SIEMENS.
The functions of the program provide a permanent support for monitoring the progress of the actions carried out by the system, in the form of graphic and dynamic representation, events or even curves.
Different user levels are available. Each of them permit a secure access and use according to the user.
Each action, alarm or feedback is associated with a textual description of different levels, blocking or not.
These events are stored in the log.
The general interface gives you as much visible data as possible. Of type, pressures, powers, movements, statuses of the various subsets of the system, etc.
Several user functions are available: production, manual, cycles and maintenance.