new
APSY-E30 MACHINE
Description
The system makes it possible to make deposits, inside the substrate on a diameter of 10mm minimum.
The pumping is carried out by a dry unit, comprising a turbomolecular pump isolated from the chamber by a valve and a primary pump. The system has a Joule effect. Several types of nacelles or filaments can be offered to you.
The system is entirely controlled by a PLC/HMI unit, SIEMENS.
specifications
All our new systems are guaranteed for two years, on-site interventions within 48 hours, remote maintenance. Preventive maintenance at the end of the warranty period.
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Leybold TURBOVAC 4501 turbomolecular pump.
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Leybold ECODRY 30 primary pump.
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Absolute pressure gauges MKS 974B and pirani 925.
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Power supply 1Kw, Tungsten filament coated with the desired material.
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Deposit control by quartz balance and Inficon XTC3 controller.
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Sample holder Ø 150mm, water cooled.
supervising
The functions of the program provide a permanent support for monitoring the progress of the actions carried out by the system, in the form of graphic and dynamic representation, events or even curves.
Different user levels are available. Each of them permit a secure access and use according to the user.
Each action, alarm or feedback is associated with a textual description of different levels, blocking or not.
These events are stored in the log.
The general interface gives you as much visible data as possible. Of type, pressures, powers, movements, statuses of the various subsets of the system, etc.
Several user functions are available: production, manual, cycles and maintenance.
dimensions
System size :
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Height : 2000mm.
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Width : 800mm.
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Profundity : 1600mm.
Chamber dimensions:
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Height: 406mm.
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Width : 406mm.
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Profundity : 406mm.
