evaporation by joule effect
MACHINE APSY-E65
Descriptition
The deposition is carried out on a rotating sample holder 380mm in diameter (maximum).
The deposits are controlled by a quartz balance. Pumping is carried out by a dry unit, comprising a primary pump and a turbomolecular pump isolated from the chamber by a valve.
The system has three Joule effects with shutter. Several types of nacelles or filaments can be offered to you.
The system is fully controlled by a PLC / HMI assembly, SIEMENS.
SPECIFICATIONS
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Cryogenic pumping CT10 and compressor 9600 CTI
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Leybold VAROSY VD100 dry screw primary pump
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Absolute pressure gauges MKS 974B and pirani 925
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TEMESCAL set, STIH 2CK 4x25cc barrel with CV-12KW power supply
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Shutter
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Deposit control by two quartz balances and Infincon XTC3 controller
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Dome Ø 560mm, disengageable rotation system from 1 to 20 tr/min
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Argon effluvage, DC 300-4000V, 08A
supervising
The functions of the program provide permanent support for the progress of actions carried out by the system, in the form of graphic and dynamic representations, events or even curves.
Different user levels are available. Each of them framing access and secure use depending on the user.
Each action, alarm or feedback is associated with a textual description of different levels, blocking or not. These events are kept in the history.
The general interface gives you as much visible data as possible. Type, pressures, powers, movements, status of the different sub-assemblies of the system, etc …
Several user functions are available: production, manual, cycles and maintenance;
dimensions
System size :
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Height : 2500mm.
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Width : 1000mm.
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Profundity : 1500mm.
Chamber dimensions :
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Height : 406mm.
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Width : 406mm.
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Profundity : 406mm.
